PLD system

We produce the physics and chemistry equipments and thin film deposition systems.

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SPLEAD PLD system that Highest performance with lowest price

Feature

High temperature(>1000deg.C) Substrate heating in high pressure (>200mmTorr) O2 was accomplished by SiC heating.
From Ultra high vacuum to high pressure (>7200mTorr) application was available.
Various optioned units were prepared lex, high pressure RHEED system, RF radical source, K-Cell, Sputter, and more.

PLD-SPV266 [1 inch model]

PLD-SPV4221 [2 inch model]

Model	PLD-SPV266[1inch model]		PLD-SPV4221[2inch model]
Specification	-S	-UHV	-S	-UHV
Chamber	Dia. 200x400 SUS304	Dia. 200x400 SUS304 Electro polished	Dia. 260x400 SUS304	Dia. 260x400 SUS304 Electro polished
Pump	>250L/s Turbopump and Mechanical pump	>350L/s Magnetic floating Turbopump and Mechanical pump	>500L/s Turbopump and Mechanical pump	>800L/s Magnetic floating Turbopump and Mechanical pump
Base pressure	1x10e-5 Pa	5x10e-7 Pa	2x10-6 Pa	1x10e-7 Pa
Substrate heating	Material: SiC Max dia.: 1 inch MaxTemp.: 1000deg.C MaxPress.: 500mTorr	Material: SiC Max dia.: 1 inch MaxTemp.: 1000deg.C MaxPress.: 500mTorr	Material: SiC Max dia.: 2 inch MaxTemp.: 1000deg.C MaxPress.: 500mTorr	Material: SiC Max dia.: 2 inch MaxTemp.: 1000deg.C MaxPress.: 500mTorr
Substrate Rotating mechanism	Rotation 20rpm Z-axis 40mm	Rotation 20rpm Z-axis 40mm	Rotation 20rpm Z-axis 40mm	Rotation 20rpm Z-axis 40mm
Target and rotation mechanism	Dia.20mmx5mm (4cups) Axis rotation 20rpm	Dia.20mmx5mm (4cups) Axis rotation 20rpm	Dia.20mmx5mm (4cups) Axis rotation 20rpm	Dia.20mmx5mm (4cups) Axis rotation 20rpm
Target exchange rotate	Manual operation	Plus motor controled	Manual operation	Plus motor controled
Gas inlet	MFC x1 Max: 50sccm	MFC x1 Max: 50sccm	MFC x1 Max: 50sccm	MFC x1 Max: 50sccm
Laser and Optics	Yag Laser(266nm,90mJ) Dia.1inch-45deg.Mirror 22.5deg.Mirror or Excimor laser	Yag Laser(266nm,90mJ) Dia.1inch-45deg.Mirror 22.5deg.Mirror or Excimor laser	Yag Laser(266nm,90mJ) Dia.1inch-45deg.Mirror 22.5deg.Mirror or Excimor laser	Yag Laser(266nm,90mJ) Dia.1inch-45deg.Mirror 22.5deg.Mirror or Excimor laser
Load lock system	NO (Option available)	Dia.200x200mm SUS304 Turbopump vacuuming Trasfer-rod system	NO (Option available)	Dia.300x200mm SUS304 Turbopump vacuuming Trasfer-rod system

Option

RHEED, High-pressure RHEED
RF radical, Sputter source
K-Cell
Automated system controller and more.

Contact by e-mail

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Please see the catalog. Catalog PDF

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