Products of splead

We produce the physics and chemistry equipments and thin film deposition systems.

SPLEAD corporation designs and manufactures thin film deposition systems and components for material researchers. SPLEAD equipment utilizes only reputable vacuum components from worldwide. We can provide custom systems to you by affordable price.

PLD Systems

This system that thin film deposition with the laser beam from outside of the vacuum chamber. It experiments on epitaxial growth in the Ultrahigh vacuum chamber. The laser uses YAG or excimer. It proposes the price and the specification according to the customer.

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The small CVD system

This system that introduces the material gas and CVD experiments simply.
The experiment is possible of　MOCVD that introduces a metal organic gas and the ALD (Atomic Layer Deposition) that using saturation surface reaction.

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Vacuum dryer[VD,HP,CP]

This system that dries the vacuum in the chamber. The vacuum pressure is controlled in detail and the bubble and the wind ripple are suppressed. Dry process can be completed with the device that matches the hot plate and the cooling plate.

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環境試験装置

This system can examine it by pressure and the temperature on the global environment in the chamber.
The shelf set up in this chamber is controlled within the range from -50 to 200deg.C. Pressure in the chamber is controlled from 1050mb to 200mb.
By the way, the hectopascal is used well in Japan. It is a strange country. :-P

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